SPiFF
SPiFF, the Semiconductor/Polymer Integrated Fabrication Facility, is a recently funded blah blah.
Publications
Please (Click) on paper to get PDF version.
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"Atomic Fluorine Beam Etching of Silicon and Realated Materials," P.R. Larson, K.A. Copeland, G. Dharmasena, R.A. Lasell, M.Keil, and M.B. Johnson, accepted by J. Vac. Sci. Technol. B (1999).
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Fig. 1: Old Van de Graaf Beamline Room.
This shows the space for the Cleanroom circa '96. At that time the decommissioned Vad de Graaff accelerator was still around. This was sold! for $5,000 in '98.
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Fig. 2: HazMat Makes Space Ready for Demolition.
This shows the space for the Cleanroom in Aug. '99.
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Fig. 3: Artists Rendition of SPiFF
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Fig. 4: Full Layout of SPiFF
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