Center for Semiconductor Physics in Nanostructures
 

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Facilities

Overview | MBE | SPiFF | STM | Lasers

SPiFF

A 400 sq. ft. class 10,000 cleanroom facility is currently under construction adjacent to our Molecular Beam Epitaxy Facility. SPiFF will house a research grade mask aligner and associated tools under class 1000 laminar flow hoods for micron feature sized photolithography. A separate room will house deposition systems (sputtering and evaporative) and a Reactive Ion Etcher (RIE). SPiFF will be used for the routine production of prototype devices for both fundamental and applied research. Users will include senior researchers, graduate students, undergraduates and industrial partners.