400 sq. ft. class 10,000 cleanroom facility is currently under construction
adjacent to our Molecular Beam Epitaxy Facility. SPiFF will house a research
grade mask aligner and associated tools under class 1000 laminar flow
hoods for micron feature sized photolithography. A separate room will
house deposition systems (sputtering and evaporative) and a Reactive Ion
Etcher (RIE). SPiFF will be used for the routine production of prototype
devices for both fundamental and applied research. Users will include
senior researchers, graduate students, undergraduates and industrial partners.