References
n
Motivation
¡
http://www.mems-
issys.com/html/singlestep.html#photolithography
¡
http://www.chipcenter.com/columns/bmcginty/col005.html
¡
http://www.adhesives.de/seiten/literature_highlights/gaynes.htm
n
Background
¡
http://www.lib.udel.edu/ud/spec/exhibits/color/lithogr.htm
¡
http://www.ee.washington.edu/research/microtech/cam/PROCES
SES/PDF%20FILES/Photolithography.pdf
¡
http://www.dbanks.demon.co.uk/ueng/plith.html
n
Theories and Methods
¡
http://www.ece.gatech.edu/research/labs/vc/theory/PosNegRes.
html
¡
http://www.ece.gatech.edu/research/labs/vc/theory/photolith.html
¡
http://www.intl-light.com/photoresist.html
n