•Exhausted Laminar Flow Hood
–Photolithography
•Sink, Spinner, Hot Plate, Oven
–ISO 5 (Class 100) environment
•Vertical Laminar Flow Hood
–MJB 3 Mask Aligner
–Microscope
–ISO 5 (Class 100) environment
•If the room is occupied use the telephone’s intercomm from the White Room to verify it’s safe to open the door and enter.
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