1
|
|
2
|
- Why a cleanroom?
- What is it?
- Facilities
- Procedures
|
3
|
- IT’S A DIRTY WORLD!
- UNCOUNTABLE PARTICLES IN AIR
- ALL SIZES, SHAPES, PROPERTIES
- NANOTECH
|
4
|
- A room, enclosure, and or environment in which you move the air by way
of supply and return locations to control the airborne particle levels
and in some cases temperature and humidity. Courtesy of
http://www.mcr-1.com/definitions.html
- A place where harmful junk is kept away from sensitive items or
materials.
|
5
|
|
6
|
|
7
|
|
8
|
|
9
|
|
10
|
|
11
|
|
12
|
|
13
|
- Follow the sequence of bouffant (hairnet), shoe covers, gloves, and
frock.
- If you are only stepping out for a short time reuse the same items.
- If you are carrying something into the cleanroom wipe it down with the
presoaked wipes.
- The reason for gowning is to expose a minimum of flaking skin, hair,
etc. that could harm your work.
|
14
|
|
15
|
|
16
|
|
17
|
|
18
|
|
19
|
|
20
|
- Hair protruding from bouffant.
- Ears not covered.
- Open collar on frock.
- Gloves rolled up and/or frock sleeves pulled back from gloves. The gloves should be fully extended up
the forearms.
- Once again, the reason for gowning is to expose a minimum of flaking
skin, hair, etc. that could harm your work.
|
21
|
|
22
|
|
23
|
|
24
|
|
25
|
- 4’ Fume Hood
- In process of obtaining additional equipment.
- Reactive Ion Etcher
- Deposition System(s)
- Will be adding Emergency Eye Wash / Shower.
|
26
|
|
27
|
- Exhausted Laminar Flow Hood
- Photolithography
- Sink, Spinner, Hot Plate, Oven
- ISO 5 (Class 100) environment
- Vertical Laminar Flow Hood
- MJB 3 Mask Aligner
- Microscope
- ISO 5 (Class 100) environment
- If the room is occupied use the telephone’s intercomm from the White
Room to verify it’s safe to open the door and enter.
|
28
|
|
29
|
|
30
|
|
31
|
|
32
|
|
33
|
- X-rays
- Scintag X’trA XRD: powder/low angle
- Philips XRD: High Resolution
- Wiring Stations
- Ball Bonder
- Indium Soldering Station
- Horizontal Laminar Flow Hood
- Optical Tables (a work in progress)
- C-V Analysis
- Coming Soon
|
34
|
|
35
|
|
36
|
|
37
|
- You must be trained before using it unassisted.
- Clean up and put away.
- Leaving your work area in better condition than you found it is a good
habit to develop.
- If you have any doubts or questions, ASK.
- Harm to you and / or equipment can result from improper procedures.
- Using / operating available facilities / equipment is a privilege not a
right.
- Your privilege can be restricted or revoked if you refuse to follow
accepted practices or rules.
|
38
|
- UCLA Nanoelectronics Research Facility
- http://nanolab.ucla.edu/new_users.htm
- http://nanolab.ucla.edu/pdf/Orient.ppt
- University of California at Berkeley
- http://microlab.berkeley.edu/
- Georgia Tech
- http://www.mirc.gatech.edu/facilities/
- University of Alabama in Huntsville
- http://www.licos.uah.edu/nmf.html
- Cornell Nanofabrication Facility
- http://www.cnf.cornell.edu/cnf/
- http://www.cnf.cornell.edu/cnf/CNFSafetyManual8.html
|