OU NanoLab/NSF NUE/Bumm & Johnson
Patterning the ITO by Photolithography
One way to shape the EL lamp is
by patterning the ITO electrode.
Only the phosphor under the ITO
electrode will be excited.
Photolithography is used to
transfer a pattern.
The ITO coated glass is covered with a
The resist is exposed under a mask of
the desired pattern.
The resist is developed.
sections of the resist dissolve while the
unexposed sections harden (positive
See the photolithography slideshow for